Shanghai Sunheat Chemicals Co., Ltd.

TMAH

TMAH
Product Detailed

TMAH
1,positive resister developer
2,silicon wafer wet etchant
3,super clean solution

Name: Tetramethyl ammonium hydroxide(TMAH) 
Synonym: N,N,N-Trimethylmethanaminium hydroxide
Appearance: Colorless transparent liquid
Quickly absorbs carbon dioxide in air to carbonate. Strong organo-alkali, corrosive nature. Easily deliquesces, be kept in lutation. Decomposed into methanol and trimethylamine at 135°C. 

It can be  widely used in electronic industry , especially as silicon wafer wet etchant positive resister developer and super clean solution for CMP process.



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